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Non-contact step height measurement microscope "TAH Series"

Since it is an optical non-contact method, measurements can be taken without the influence of deformation or dents on the workpiece!

The "TAH Series" is a microscope that allows for non-contact measurement of height, depth, and steps by aligning the "Focus Navi Mark" equipped in the microscope optical system with the Z-axis movement. By incorporating the Focus Navi Mark, reproducibility is significantly improved without relying on the operator. There are two types available: a trinocular type and a straight tube type, allowing for selection based on application. (The camera is of C-mount type) 【Features】 ■ Two types of objective lenses are available: infinite system f=180 type and f=200 type ■ Compact size ■ Can be mounted as a measurement scope on the device ■ Measurement stages, TV camera devices, and measurement software can be combined according to purpose *For more details, please download the PDF or contact us.

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